Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

The fabrication process of the bio-inspired PDMS coupled with sprayed

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Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

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Fabrication procedure of the microlens array: ( a ) microhole

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Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

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A) Mold fabrication by photolithography process: SU8 photoresist

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a) The procedure for preparation of the PDMS soft mold and reverse